Silicon-alloyed Isotropic Pyrolytic Carbon Prepared by Steady-state Fluidized Bed Chemical Vapor Deposition
ZHANG Jian-hui
LIU Gang
ZHENG Yan-zhen
School of Mechanical Engineering,Hangzhou Dianzi University,Hangzhou Zhejiang 310018,China
摘要：Silicon-alloyed isotropic pyrolytic carbon(Si-IPyC)was prepared by steady-state fluidized bed chemical vapor deposition(SFBCVD).The effects of deposition temperature and propane concentration on the microstructure and deposition process of Si-IPyC were investigated using X-ray diffraction(XRD),X-ray energy dispersive spectrometer(EDS)and scanning electron microscope(SEM).The results show that the Si-IPyC with different silicon content is composed of both spherical granular and laminar structures,and silicon element is uniformly dispersed in pyrolytic carbon in the form of β-SiC.The deposition temperature and propane concentration have a great influence on the microstructure of Si-IPyC,with the increase of deposition temperature or propane concentration,the laminar structure in Si-IPyC decreases gradually,spherical granular morphology becomes increasingly obvious and the density decreases with the deposition model changing from surficial growth mechanism to gaseous nucleation mechanism.For getting a faster average coating rate,deposition temperature and propane concentration should not be too high.
机标关键词：
分类号：TB332(工程材料学)
论文发表日期：2021-06-30
在线出版日期：2025-08-15（本平台首次上网日期，不代表文献的发表时间）
页数：11( 58-68 )
英文信息